Realization of a Cost-Effective Deformable Grating for the Extreme-Ultraviolet

Abstract The application of a deformable grating to the realization time delay compensated monochromator is presented. realized as replica on thin glass substrate and deformation with mechanical bender. conceived for spectral selection single harmonic in range 20-80 nm beamlines exploiting high generation process. A possible optical design requiring only two gratings, mirror an intermediate slit